METHOD AND DEVICE FOR FORMING MICROOPTICAL ELEMENT

摘要

PURPOSE:To provide the method and device for forming the microoptical element by space selective thin-film formation having the controllability of film shapes and film quality by movably disposing a mask having an aperture of a prescribed size between the spot source spot on a target surface and a substrate for vapor deposition. CONSTITUTION:The target 5 in a vacuum cell 3 is irradiated with the laser beam oscillated from a laser beam source 1 at 45 deg. incident angle via a condensing window part 4 by a condenser element 2. The surface of the target 5 is gradually chipped by the irradiation with the laser beam to change the splashing direction but always the fresh surface of the target 5 is irradiated with the laser beam by the rotation of a mechanism 6 for supporting and rotationally moving the target. The mask 8 having the aperture of the prescribed size is movably provided between the surface to be irradiated with the laser of the target 5 and the vapor deposition surface of the substrate 7 for vapor deposition. The shape of the deposited film on the substrate 7 is controlled by controlling the position of the mask 8. The microlens having desired optical performance is stably formed in this way.