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发明名称
AUTOMATIC DEFECT DETECTION SYSTEM
摘要
申请公布号
EP0179309(B1)
申请公布日期
1991.09.25
申请号
EP19850112342
申请日期
1985.09.30
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BRONTE, JOSEPH JAMES;HEBERT, ROLAND CHARLES;KHOURY, HENRI ANTOINE
分类号
G01N21/88;G01B11/30;G01N21/93;G01N21/94;G01N21/95;G01N21/956;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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