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摘要
申请公布号
JPH0394089(U)
申请公布日期
1991.09.25
申请号
JP19900000897U
申请日期
1990.01.11
申请人
发明人
分类号
H01J37/28;G01N37/00;G01Q10/04;G01Q60/10;H01L41/08;H01L41/083;H01L41/09;H02N2/00;(IPC1-7):H02N2/00
主分类号
H01J37/28
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代理人
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