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发明名称
DEVICE FOR FILM DEPOSITION
摘要
申请公布号
SU1679568(A1)
申请公布日期
1991.09.23
申请号
SU19884430781
申请日期
1988.05.27
申请人
SUMSKOE PROIZV OB "ELEKTRON"
发明人
PLASTYUK ALEKSANDR I,SU;KOSTROMENKO VIKTOR L,SU;KOBYLYAKOV VALENTIN A,SU;LYALKO IVAN S,SU;SHELEKHOV VLADIMIR V,SU
分类号
H01L21/02;G01B11/06
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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