Swivelling light beam from comb-shaped electrodes - deflecting adjacent electrodes stepwise to provide swivelable, part-mirrored surface

摘要

The light beam from several adjacent electrodes in a comb pattern is swivelled and deflected, the electrodes being optically reflecting and electrostatically deflectable. They are made as micromechanical elements of a semiconductor substrate. Several adjacent electrodes (4) are so stepwise deflected that a swivellable, part-mirrored surface is formed w.r.t. to the substrate surface. Several such part-mirrored surface are arranged next to each other and are swivelled through a preset angle w.r.t. substrate surface in dependence on the reflection angle to be generated. USE/ADVANTAGE - IR optical, or quasi-optical radar systems, with continuous light beam swivel over wide angular range.