APPARATUS FOR PRODUCING COMPOUND SEMICONDUCTOR THIN FILMS,申请号EP19910101525-传众专利搜索

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发明名称	APPARATUS FOR PRODUCING COMPOUND SEMICONDUCTOR THIN FILMS
摘要
申请公布号	EP0445533(A3)	申请公布日期	1991.09.18
申请号	EP19910101525	申请日期	1991.02.05
申请人	UNIVERSITY OF DELAWARE	发明人	VARRIN, ROBERT D., JR.;BIRKMIRE, ROBERT W.
分类号	H01L21/365;C23C16/30;C23C16/448;(IPC1-7):C23C16/44	主分类号	H01L21/365
代理机构		代理人
主权项
地址

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