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发明名称
A TWO-DIMENSIONAL POSITIONING APPARATUS
摘要
申请公布号
EP0437741(A3)
申请公布日期
1991.09.18
申请号
EP19900124053
申请日期
1990.12.13
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BOBROFF, NORMAN;KENDALL, RODNEY ARTHUR
分类号
H01L21/68;B23Q1/48;B23Q5/22;B23Q5/34;(IPC1-7):B23Q1/14;G05B19/403;G05B19/25
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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