发明名称 STAGE EQUIPMENT
摘要 PURPOSE:To prevent the overrun of a stage at the time of service interruption of a power supply in normal service, by installing a stage controlling means for service interruption which decreases the speed of a stage and stops it with the electric power fed from a backup power supply, after the service interruption is detected, when the service interruption of a power supply for a controlling part and a driving part of the stage is generated while the stage is moving. CONSTITUTION:When service interruption of a power supply 320 for a stage controlling part 301 and a stage driving part 310 occurs while the stage is moving, a means 325 detects it, and a backup power supply 324 backs up the power supply 320 for the controlling part 301 and the driving part 310. When the service interruption of the power supply for the controlling part 301 and the driving part 310 occurs while the stage is moving, the speed of the stage is decreased and the stage is stopped with the electric power fed from the backup power supply 324. Hence, when the service interruption of the power supply 320 for the stage controlling part 301 and the stage driving part 310 occurs while the stage is moving, the stage does not run to the state free out control but is subjected to specified speed reduction and stop control. Thereby overrun of the stage can be prevented.
申请公布号 JPH03211815(A) 申请公布日期 1991.09.17
申请号 JP19900006277 申请日期 1990.01.17
申请人 CANON INC 发明人 UDA KOJI;MORI TETSUZO;UZAWA SHUNICHI
分类号 G03F9/00;B23Q1/26;B23Q1/30;B23Q1/38;G03F7/20;H01L21/027;H01L21/30 主分类号 G03F9/00
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