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发明名称
HEATER
摘要
申请公布号
JPH03207861(A)
申请公布日期
1991.09.11
申请号
JP19900001423
申请日期
1990.01.08
申请人
FUJI ELECTRIC CO LTD
发明人
KOGUCHI MAKOTO;SAKAKIBARA YASUSHI
分类号
C23C16/02;H01L21/205;H01L21/285;H01L21/31
主分类号
C23C16/02
代理机构
代理人
主权项
地址
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