Optical scanning system for raster measurement graduations - has light sensor as doped regions in semiconducting substrate with grids applied during mfr.

摘要

An optical scanning system for raster graduations consists of several phase shifted scanning grids (12a,12b) mounted on a common carrier and a corresp. number of light sensors (5b,5b) with mutually separate, associated sensing surfaces. The sensing surfaces are arranged behind grids in the path of light from a source. The sensors are formed as suitably doped regions in a common semiconducting substrate (4). The grids are mounted on the surfaces of their associated light sensors during mfr. of the substrate. USE/ADVANTAGE - Precise measurement of lengths and angles between relatively movable machine parts using partic. compact and low-cost arrangement.