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经营范围
发明名称
SUBSTRATE INSPECTING APPARATUS
摘要
申请公布号
JPH03202757(A)
申请公布日期
1991.09.04
申请号
JP19890343970
申请日期
1989.12.29
申请人
OMRON CORP
发明人
KOBAYASHI SHIGEKI;TANAKA KOICHI
分类号
G01N21/88;G01N21/956;H04N7/18;H05K13/08
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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