| 摘要 |
<p>PURPOSE:To prevent the contamination of the surface of a chuck body made of molded and sintered ceramic material for placing a workpiece, and ensure the accurate levelness of the surface by forming a ceramic thin film substantially free from a bore on the aforesaid surface. CONSTITUTION:A vacuum chuck 1 is approximately disc-shaped and the center part thereof has a drilled bore 2 for connection to a vacuum pump or the like. Also, a groove 3 continuous to the bore 2 is formed on the surface of the chuck 1 where a workpiece W such as silicon wafer is placed, The aforesaid vacuum chuck 1 comprises a chuck body 4 and a ceramic thin film 5 formed on the surface where the workpiece W is placed. Also, a fine bore 6 exists in a grain boundary inside the chuck body 4, but the ceramic film 5 has a dense structure substantially free from a bore. According to the aforesaid construction, the surface for placing the workpiece W can be made free from contamination, and the accurate levelness thereof can be obtained. At the same time, deformation due to heat can be restrained.</p> |
