摘要 |
PURPOSE:To obtain illuminance distribution more enhanced in uniformity by making the incident angle of light to an integrator lens smaller than the condensing angle of light to the second focus by a relay optical system. CONSTITUTION:The light from a short arc type discharge lamp 1 is condensed by an oval condensing mirror 2. Further, the second focus f2 of the oval condensing mirror 2 is projected on an integrator lens 4 by a relay optical system 3. The incident angle theta2 of light to the integrator lens 4 is made smaller than the condensing angle theta3 of light to the second focus f2 by the relay optical system 3. By this method, the emitting angle theta3 of light from the integrator lens 4 can be made small and illuminance distribution more enhanced in uniformity can be obtained. |