| 摘要 |
PURPOSE:To obtain high recording sensitivity and a large reproduction output with combination f characteristics of a magnetic film and a vertically magnetized layer, by providing the intra-surface magnetic anisotropy to a magnetic layer of low coercive force and setting the axis of difficult magnetization in the driving direction of a record/reproduction mode. CONSTITUTION:A holding means 41 for substrate 40 to which a magnetic thin film is formed is provided at the side of targets T1 and T2 within a vacuum tank 10. This means 41 consists of three rolls, i.e., a draw-out roll 41a, a support roll 41b and a take-up roll 41c which are supported rotatably and in parallel to their shafts each other by a support bracket. The substrate 40 is held in the approximately rectangular direction to sputter faces T1s and T2s and opposite to the space between the targets T1 and T2. A layer having low coercive force is formed on the substrate by ''Permalloy'', and the vertically magnetized layers of Co-Cr are successively formed to obtain a double-layer film medium. The air within the tank 10 is evacuated after the substrate is set, and gaseous argon is fed into the tank 10 up to a prescribed level of pressure to perform press sputtering for 3-5min. |
