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经营范围
发明名称
WASHER FOR SEMICONDUCTOR WAFER
摘要
申请公布号
JPH03200327(A)
申请公布日期
1991.09.02
申请号
JP19890341049
申请日期
1989.12.27
申请人
SHIMADA PHYS & CHEM IND CO LTD;MITSUBISHI ELECTRIC CORP
发明人
OISHI MITSURU;OMORI MASASHI
分类号
B08B3/08;H01L21/304
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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