| 摘要 |
PURPOSE:To obtain a redundancy circuit of a high yield which operates perfectly even if a defect exists by forming the above circuit in such a manner as to have >=1 spare circuits per piece of the circuit. CONSTITUTION:An N-stage shift register 103 is constructed to be provided with a spare shift register 102 per stage in addition to a shift register 101. The shift register 101 is electrically connected to an input terminal 104 or output terminals 105 to 108. On the other hand, the spare shift register 102 is electrically insulated from the input terminal 104 or the output terminals 105 to 108. The substitution of the defect circuit to the spare circuit is executed by irradiating the predetermined trimming point with an energy beam, for example, a laser beam, ion beam or electron beam and cutting and welding the wiring. The circuit which operates perfectly even if the defect arises is produced in this way and the yield is improved. |
