发明名称 SULFURIC ACID TREATMENT
摘要 PURPOSE:To facilitate efficient ozone oxidizing processing by projecting sulfuric acid, which has ozone generated by electric decomposing processing of sulfuric acid, into the substance to be oxidized so that it may contact with this substance. CONSTITUTION:Sulfuric acid 5, which has ozone generated by the electric decomposing processing of sulfuric acid, is projected into the substance 3 to be oxidized so that it may contact with this substance. That is, the sulfuric acid 5, which has ozone generated by the electric decomposing processing of the sulfuric acid, is the one that the minute bubbles of ozone generated by electrically decomposing sulfuric acid directly are included or dissolved in sulfuric acid or sulfuric acid aqueous solution. Accordingly, since ozone generated by electric decomposition is used, even if special ozone feeder is not used, ozone is included or dissolved uniformly directly in sulfuric acid. Hereby, ozone contacts with the substance 3 to be oxidized efficiently, so oxidation processing can be done efficiently.
申请公布号 JPH03196612(A) 申请公布日期 1991.08.28
申请号 JP19890336979 申请日期 1989.12.26
申请人 EBARA CORP 发明人 MATSUMURA MASAO;AOKI KATSUYUKI;KOGURE NAOAKI
分类号 G03F7/42;C01B13/10;C23F1/00;C25B1/00;C25B1/13;C25B1/30;H01L21/027;H01L21/30 主分类号 G03F7/42
代理机构 代理人
主权项
地址