Motion guiding device.

摘要

A motion guiding device includes a first movable member (4) movable in a first direction (Y); a second movable member (5) movable in a second direction (X) different from the first direction and for guiding motion of the first movable member (4) in the first direction (Y) through a gas pressure; a base for supporting the first and second movable members independently of each other, with respect to a vertical direction (Z) through cooperation of a gas pressure; a guide (2) fixed to the base, for guiding motion of the second movable member (5) in the second direction (X) through cooperation of a gas pressure and a magnetic force of a permanent magnet; a first linear motor for moving the first movable member (4) in the first direction (Y), relative to the second movable member (5); and a second linear motor for moving the second movable member (5) with the first movable member (4) in the second direction (X).