发明名称 Phase-accurate imaging and measuring of elastic wave fields with a laser probe
摘要 Heretofore, models for calculating the wave propagation in SAW components did not consider all physical effects, deviations between realized and desired component behavior therefore frequently occur. In order to improve such models, the wave field in the component is imaged in a phase-accurate manner or to measure the parameters that characterize the elastic wave in a topically-resolved manner. Herein, the deflection of the component surface produced by the elastic wave is quantatively acquired by measuring the deflection of a pulsed laser beam. A mode-coupled Nd:YAG laser with a subsequent pulse compressor is used as the radiation source.
申请公布号 US5042302(A) 申请公布日期 1991.08.27
申请号 US19900500916 申请日期 1990.03.29
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 SOELKNER, GERALD
分类号 G01H9/00 主分类号 G01H9/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利