摘要 |
Heretofore, models for calculating the wave propagation in SAW components did not consider all physical effects, deviations between realized and desired component behavior therefore frequently occur. In order to improve such models, the wave field in the component is imaged in a phase-accurate manner or to measure the parameters that characterize the elastic wave in a topically-resolved manner. Herein, the deflection of the component surface produced by the elastic wave is quantatively acquired by measuring the deflection of a pulsed laser beam. A mode-coupled Nd:YAG laser with a subsequent pulse compressor is used as the radiation source.
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