FILM THICKNESS MEASURING METHOD AND DEVICE THEREFOR

摘要

M-14-45396M/KH(F-4813-07)/87 A film thickness measuring method and device therefor which are free from drawbacks caused by errors in a sheet conveying system and an optical system of the device and the like. The optical system is moved over a sheet having a sheet member and a film formed thereon, whose thickness is to be measured, so that the deformation of the conveying system and the optical system is detected in advance. After taking the detection results into an acount, the thickness measurement is carried out resulting in improving an accuracy thereof.