| 摘要 |
PURPOSE:To ensure fixation of a substrate and a table by mounting a ventilation preventing apparatus consisting of a cover member having a flexible sheet applied to the upper surface thereof and a drive part moving the cover member to the position covering the substrate to be inspected on an inspection table. CONSTITUTION:A cover member 40 having a flexible sheet 42 applied thereto in an airtight state with sagging is constituted on the upper surface of a frame body 41 larger than a substrate P to be inspected. The substrate P is placed on an inspection table 11 and the member 40 is fixed on the table 11 by the operation of a drive part 40 so as to cover the substrate P. Subsequently, when a vacuum apparatus 5 is operated, the sheet 42 is sucked so as to press the substrate P to the table 11 in such a case that an air vent is formed through the substrate to fix the substrate P. By this method, even when a prove pin 14 is brought into contact with the substrate P under pressure, the substrate P can be held to the table 11 in a fixed state. |
