| 摘要 |
PURPOSE:To shorten the time of inspection and to make it possible to control the result of inspection accurately by detecting the recognition of identification characters and the presence or absence of defects at the same time based on the components from an identification character region and divided components other than the character region. CONSTITUTION:A work 5 on a rotary mounting stage 3 is continuously scanned with laser light 17 from a scanning part 1 starting from the center of the work toward the outer surface. The mounting stage 3 is rotated at a specified angular speed, and the entire surface of the work 5 is scanned in one rotation. In the reflected light in this scanning, the component of an identification character region 16 and the component of a surface-defect inspecting region 19 are included. A dividing part 7 divides the components. The recognition of identification characters and the inspection of the state of surface defects are performed at the approximately same time in a character-data processing part 9 and a surface-data processing part 11. Thereafter, the images as the results of the respective processings are processed in a control computer 13. The data wherein correspondence of 1:1 is obtained are transmitted into an upper computer 15 with the identification-character recognition data as an index. |
