发明名称 |
Method of operating an electron beam measuring device |
摘要 |
In modern electron beam measuring devices the thermal La/B6 or field emission source is replaced by a photocathode acted upon by a pulsed laser beam. Since the width of photoelectron pulses corresponds approximately to the width of the laser pulses, theses devices are particularly suitable for stroboscopic measurements in fast gallium arsenide circuits. The expenditure on apparatus for generating the photoelectron pulses is considerable since means for doubling the frequency of the primary laser light are necessary. It is therefore proposed to irradiate the cathode of the electron beam measuring device with photons of energy EPh<W (W:=electron work function of the cathode material) and to reduce the work function with the aid of an external electrical field to such an extent that photoemission occurs, but not field emission.
|
申请公布号 |
US5041724(A) |
申请公布日期 |
1991.08.20 |
申请号 |
US19890419458 |
申请日期 |
1989.10.10 |
申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR, HALBLEIT ERPRUFTECHNIK MBH |
发明人 |
FEUERBAUM, HANS-PETER;FROSIEN, JUERGEN |
分类号 |
H01J37/06;H01J37/073 |
主分类号 |
H01J37/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|