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发明名称	AETZVERFAHREN.
摘要
申请公布号	AT66093(T)	申请公布日期	1991.08.15
申请号	AT19860305068T	申请日期	1986.06.30
申请人	BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANY	发明人	HAIGH, JOHN;AYLETT, MARTIN RICHARD
分类号	H01L21/302;H01L21/268;H01L21/306;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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