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发明名称
CRYSTAL BASE MATERIAL AND FORMATION THEREOF
摘要
申请公布号
JPH03187999(A)
申请公布日期
1991.08.15
申请号
JP19890323942
申请日期
1989.12.15
申请人
CANON INC
发明人
SATO NOBUHIKO
分类号
C30B29/64;H01L21/205
主分类号
C30B29/64
代理机构
代理人
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地址
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