发明名称 Methods of forming semiconductor constructions and flash memory cells
摘要 Some embodiments include methods of forming flash memory cells and semiconductor constructions, and some embodiments include semiconductor constructions. Some embodiments may include a method in which a semiconductor substrate is provided to have a plurality of active area locations. Floating gates are formed over the active area locations, with the floating gates having widths that are entirely sub-lithographic. Adjacent floating gates are spaced from one another by gaps. Dielectric material and control gate material are formed over the floating gates and within the gaps. Some embodiments may include a construction in which a pair of adjacent floating gates are over a pair of adjacent active areas, with the floating gates being spaced from one another by a distance which is greater than a distance that the active areas are spaced from one another.
申请公布号 US7588982(B2) 申请公布日期 2009.09.15
申请号 US20060512781 申请日期 2006.08.29
申请人 MICRON TECHNOLOGY, INC. 发明人 SANDHU GURTEJ S.;PRALL KIRK D.
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
主权项
地址