Capacitive pressure or pressure difference sensor - has resilient membrane with applied conductive layer acting as one plate of variable capacitor

摘要

The sensor has at least two plates of an electrically insulating hysterosis-free material their peripheral edges sealed together via melted glass, their parallel inside faces carrying electrically conductive layers (3,4,7) providing a capacitor. One of the two plates is provided by a resilient membrane (2) responsive to an applied press the capacitance value of the capacitor indicating the membrane deflection and hence the press. The conductive layer (7) applied to the membrane (2) extends as far as the melted glass seal (6), that applied to the second carrier plate (1) lying only within the centre. ADVANTAGE - Min. mfg. complexity.