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发明名称
FORMATION OF CRYSTALLINE SEMICONDUCTOR THIN FILM AND SOI DEVICE
摘要
申请公布号
JPH03185713(A)
申请公布日期
1991.08.13
申请号
JP19890324580
申请日期
1989.12.14
申请人
CANON INC
发明人
KOMATSU TOSHIYUKI
分类号
H01L21/205;H01L21/203;H01L21/336;H01L21/84;H01L29/78;H01L29/786
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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