ELECTRIC FIELD EMITTING ELECTRON MICROSCOPE WITH MULTI-STEP ACCELERATION,申请号JP19900325992-传众专利搜索

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发明名称	ELECTRIC FIELD EMITTING ELECTRON MICROSCOPE WITH MULTI-STEP ACCELERATION
摘要
申请公布号	JPH03184249(A)	申请公布日期	1991.08.12
申请号	JP19900325992	申请日期	1990.11.29
申请人	HITACHI LTD	发明人	ENDO JUNJI;TONOMURA AKIRA;OZASA SUSUMU;MATSUDA TSUYOSHI;KIMURA TSUTOMU;OSAGABE NOBUYUKI
分类号	H01J37/073;H01J37/248	主分类号	H01J37/073
代理机构		代理人
主权项
地址

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