| 摘要 |
<p>PURPOSE:To surely hold and fix a substrate while a spinner is being turned by a method wherein this device is constituted of two parts of an upper jig and a lower jig, at least either of them is provided with a magnet while the other is provided with a magnet or a magnetic substance. CONSTITUTION:A square substrate 12 is placed so as to be pushed to a shoulder part 11 of a lower jig 10; then, an upper jig 13 is placed in such a way that the substrate 12 is pushed to the shoulder part 11. A through hole 14a is made in the central part of the lower jig 10; a groove 17 is formed to a substrate arrangement part 15 and an upper-jig arrangement part 16 from the through hole 14a. When the through hole 14a is set to a weak vacuum, the square substrate 12 and the upper jig 13 can be vacuum-sucked to an extent capable of preventing them from being scattered. When a spin turn is started, a centrifugal force acts on the upper jig 13 by the turn. Since an iron sheet 18 attached to the upper jig 13 is attracted to a magnet 19 attached to the lower jig 10, the upper jig 13 always fastens the square substrate 12 in the horizontal direction.</p> |
