发明名称 Superconductor gate field effect transistor.
摘要 <p>In a Field Effect Transistor (FET) the use of a high Tc oxide superconductor material in the gate electrode (8) provides both control of parasitic resistance and capacitance and a proper work function when operated at a temperature below the Tc. The 1-2-3 compound oxide superconductors with the general formula Y1Ba2Cu3O7-y where y is approximately 0.1 have the ability in use in FET's to provide convenient work functions, low resistance and capacitance, and to withstand temperatures encountered in processing as the FET is being manufactured.</p>
申请公布号 EP0439751(A2) 申请公布日期 1991.08.07
申请号 EP19900124052 申请日期 1990.12.13
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHAUDHARI, PRAVEEN;GAMBINO, RICHARD JOSEPH;KOCH, ROGER HILSEN;LAIBOWITZ, ROBERT BENJAMIN;GANIN, ETI;SAI-HALASZ, GEORGE ANTHONY;KRUSIN-ELBAUM, LIA;SUN, YUAN-CHEN;WORDEMAN, MATTHEW ROBERT
分类号 H01L27/092;H01L21/8238;H01L29/43;H01L29/49;H01L29/78;H01L39/02 主分类号 H01L27/092
代理机构 代理人
主权项
地址
您可能感兴趣的专利