发明名称
摘要 PURPOSE:To easily verify the straightness of laser beam and fork by using pluraeity of jigs providing a weight and through-hole at the buffer wall and rolling wheels which rolls in the circumferencial direction on the internal bottom surface of fork at the lower part thereof. CONSTITUTION:Rolling wheels 34 are respectively provided to four corners of almost square buffer wall 33 and when a jig 32 is placed on the internal bottom surface of a fork 31, the jig 32 can rotates in the circumferencial direction of the fork 31 owing to the rolling wheels 34. Moreover, a weight 35 is mounted to the center lower part of the buffer wall 33 and thereby the buffer wall 33 is always kept vertically. Moreover, a through hole 36 which allows the laser beam to pass is formed at the area on the buffer wall corresponding to the center axis of the fork 31 kept in vertical. Total of three jigs 32 are used for correcting the straightness of fork 31.
申请公布号 JPH0351099(B2) 申请公布日期 1991.08.05
申请号 JP19810209420 申请日期 1981.12.25
申请人 HITACHI SEISAKUSHO KK;HITACHI DENSHI ENJINIARINGU KK 发明人 NISHIMURA SADATOMO;IKEDA KENICHI;SUGIURA NORIO
分类号 H01L21/673;G01B11/30;H01L21/22;H01L21/677 主分类号 H01L21/673
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