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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH03179730(A)
申请公布日期
1991.08.05
申请号
JP19890317778
申请日期
1989.12.08
申请人
HITACHI LTD
发明人
TSUJI YOICHIRO;MITOMI YOSHINORI
分类号
H01L21/302;H01L21/205;H01L21/3065;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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