METHOD FOR ETCHING METAL LAYER,申请号JP19890315624-传众专利搜索

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发明名称	METHOD FOR ETCHING METAL LAYER
摘要
申请公布号	JPH03177585(A)	申请公布日期	1991.08.01
申请号	JP19890315624	申请日期	1989.12.04
申请人	FUJITSU LTD	发明人	OGAWA TETSUYA;SUDO ATSUSHI;HORIO KENJI;SATO TETSUO
分类号	C23F1/00;H05K3/06	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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