Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of Freeman or similar type.

摘要

The device comprises a cylindrical casing (1) provided with an internal cavity (2) and with a flange (3) and an arc chamber (15) superimposed over the cylindrical casing (1) and including a filament (20) electrically supplied through supply conductors (8, 7, 6) external to said casing (1) and supported by said flange (3), a repeller plate (21) held at a negative voltage through supply conductors (8, 7, 6) external to said casing (1) and supported by said flange (3) and an inlet (19) for a gas which may be ionized. Inside the arc chamber (15) there is also a support (23) for the metal to be ionized (24) supported and connected electrically to an electrode (13) at a negative voltage by means of a rod (9) passing through the internal cavity (2) of said cylindrical casing (1). <IMAGE>