| 摘要 |
PURPOSE:To measure a concn. distribution with good accuracy by measuring the characteristic X-ray intensities of desired elements by irradiation with electron beams while changing acceleration voltages each slightly and relating the depths from the sample surface and the acceleration voltages by specific equation, thereby enhancing the resolving power in the depth direction. CONSTITUTION:The electron beam min. acceleration voltage which can radiate the characteristic X-rays of the desired element by electron beam excitation is designated as Ve. The characteristic X-rays X 0, X 1, X 2... of the desired element are measured by the irradiation with the electron beams of the acceleration voltage V 0 slightly higher than Ve and successively each slightly higher acceleration voltages V 1, V 2.... The approximate compsn. of the essential component elements of the sample is measured and the average atomic number Zi, average atomic weight Ai and average density rhoi at the time of the respective acceleration voltages are calculated. The depth Di from the sample surface and the electron beam acceleration voltages are related by the equation and the average concn. C 0 of the desired element down to the depth D 0 is determined from the characteristic X-ray intensity X 0 at the acceleration voltage V 0 and a calibration curve. The concns. of the desired element of the respective layers in the depth directions are thereafter successively determined by using the average concns. C 1, C 2... between the depths D0 and D 1, between D 1 and D 2.... |
