MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19890311398-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH03173128(A)	申请公布日期	1991.07.26
申请号	JP19890311398	申请日期	1989.11.30
申请人	TOSHIBA CORP;TOKUDA SEISAKUSHO LTD	发明人	BABA YOSHIAKI;ETSUNO YUTAKA;OSAWA AKIHIKO;YAMAWAKI KENJI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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