发明名称 PACKAGE OF SEMICONDUCTOR ACCELERATION SENSOR
摘要 <p>PURPOSE:To preclude damage due to a fall by providing the semiconductor acceleration sensor to a member which is fitted with a buffer material externally and is high in mechanical strength, and covering the external surface of the sensor with a plastic elastomer. CONSTITUTION:A 1st member 1 is formed of glass-fiber contained nylon, etc., which is thermally stable and has large mechanical strength. An amplifier 6 and the acceleration sensor 7 are fixed to a base plate 5 fixed to the member 1 and the buffer material 8 is stuck on the external surface of the member 1. A 2nd member 4 formed of the elastomer is fixed to the outer periphery of the end part of the member 1 so as to cover the external surface. The member 4 has bellows 4a which can expand axially and damper oil is charged between the member 4 and plywood 5. This constitution prevents the sensor from breaking owing to a shock at the time of a fall.</p>
申请公布号 JPH03170065(A) 申请公布日期 1991.07.23
申请号 JP19890310363 申请日期 1989.11.28
申请人 MITSUBISHI ELECTRIC CORP 发明人 ONISHI MASAYOSHI
分类号 G01P15/12;G01H1/00;G01P15/08;H01L29/84 主分类号 G01P15/12
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