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发明名称
PLANENTENGETRIEBE FUER DIE BEWEGUNG EBENER, IM HOCHVAKUUM ZU BESCHICHTENDER SCHICHTTRAEGER
摘要
申请公布号
DD292057(A5)
申请公布日期
1991.07.18
申请号
DD19900337945
申请日期
1990.02.19
申请人
FRIEDRICH-SCHILLER-UNI. BFS,DE
发明人
SCHMIDT,EBERHARD,DE;SCHEWE,MICHAEL,DE;HOEFER,BERND,DE;SCHMIDT,BRIGITTE,DE;PFEIFER,GISELA,DE;GUENTHER,JOERG,DE
分类号
F16H13/06;(IPC1-7):F16H13/06
主分类号
F16H13/06
代理机构
代理人
主权项
地址
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