| 摘要 |
PURPOSE:To stably maintain a D.C. electric current for a long time and to facilitate increase in area and temp. reduction in diamond synthesis by using, as a cathode, a mesh in which wire diameter and pitch are specified and which is composed of a material selected from Mo, W, and Ta. CONSTITUTION:In diamond synthesis, a mesh composed of a material consisting of one or plural elements among Mo, W, and Ta and having <=0.5mm wire diameter and <=3mm pitch is used as a cathode. By using the above mesh, the emissivity of electrons can be improved and high density plasma can be maintained stably for a long time. In addition, ignition in the electric discharge in the initial stage can be facilitated. By this method, a cathode having a shape corresponding to the shape of a material to be coated can be used, and the application of diamond coating to a base material having a three-dimensional shape is made possible. |
