| 摘要 |
PURPOSE:To improve resolution by using a resist compsn. obtd. by dissolving silicone resin contg. a specified structure in the molecule and a compd. having a triazine ring in an org. solvent. CONSTITUTION:A silicone compd. contg. a structure represented by formula I and a compd. having a triazine ring are dissolved in an org. solvent to obtain a resist compsn. In the formula I, each R1 is 2-4C alkenyl, R1's may be different from each other and each of l, m and n is a positive integer of 1-1,000. A nega tive type resist for the upper layer of a two-layered structure for ionized radia tion having superior sensitivity and resolution is obtd. |
