发明名称 WASHING DEVICE
摘要 <p>PURPOSE:To make it possible to successively wash a large quantity of materials to be washed by mixed chemical solution without contamination by a method wherein a plurality of suction tubes, which are connected to a jet-stream tube at prescribed interval, and a plurality of chemical liquid vessels, in which the end opening of the suction tubes are inserted, are provided. CONSTITUTION:Two suction tubes 4a and 4b, which are communicated to a jet-stream tube 1 while being separated by a prescribed distance, are connected to the jet-stream tube 1, and the suction tubes are inserted to chemical solution vessels 5a and 56 respectively. When a pressure-feeding pump 2 is operated, the solution medium which is sucked up from a liquid refrigerant vessel 3 is allowed to flow in the jet-stream tube 1 along the longitudinal direction of the tube. At this time, the chemical liquid is sucked up from the chemical liquid vessels 5a and 5b by the jet stream of the solution medium, it is mixed with the solution medium of the jet-stream tube 1, and the mixture is jetted out from the end opening of the jet-stream tube 1. The material 6 to be washed is washed by the jetted mixture liquid. As a result, the material 6 to be washed can be washed by the chemical solution repeatedly without contamination, and also the washing device is protected from corrosion and the like.</p>
申请公布号 JPH03165519(A) 申请公布日期 1991.07.17
申请号 JP19890305629 申请日期 1989.11.24
申请人 OMI TADAHIRO 发明人 OMI TADAHIRO;SHIBATA SUNAO
分类号 H01L21/304;B05B7/28;B05B7/30;B05B7/32;H01L21/00 主分类号 H01L21/304
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