| 摘要 |
<p>An improved semiconductor pellet detection method is disclosed. In the method, an image of a semiconductor pellet is stored as a reference image in a memory, an image of a semiconductor pellet to be measured is taken a correlation coefficient between the reference image stored in said memory and the image taken is determined, and the image of a semiconductor pellet to be measured as a new reference image is stored in a different storage region of said memory when obtained correlation coefficient is small or detection is not possible. The method may further include the steps of: counting the number of reading a plurality of reference images stored in a memory to determine a frequency, and controlling the order of reading said plurality of reference images in accordance with the read frequency so as to realize learning. <IMAGE></p> |
