METHOD AND APPARATUS FOR FORMING LAYER OF GRADIENT FUNCTIONAL MATERIAL

摘要

PURPOSE:To reduce ununiformity in compsn. by carrying out a suspending stage in which the mixing ratio of suspended particles is continuously changed and a stage for forming a gradient compsn. layer. CONSTITUTION:A slurry A is injected into a stirring and mixing vessel 1 and a stirrer 11 and a circulation pump 3 are driven. After the lapse of a prescribed time, an on-off valve 4b is closed, an on-off valve 4a is opened to introduce the slurry A into a filtration vessel 2 by a prescribed amt. and simultaneously a vacuum pump is driven. Powdery starting material in the slurry A introduced into the vessel 2 settles and accumulates on the surface of a filter medium 21. After the lapse of a prescribed time, an on-off valve 4c is opened to continuously inject a slurry B into the vessel 1 at a prescribed flow rate and simultaneously an on-off valve 4d is opened to discharge a mixed slurry from the vessel 2 at a prescribed flow rate. The deterioration of environment can be prevented.