| 摘要 |
PURPOSE:To eliminate the need for the alignment of the optical axes of optical elements by piercing a single-crystal silicon substrate with plural through holes by anisotropic etching and irradiating the substrate with UV. CONSTITUTION:The single-crystal silicon substrate 20 is pierced with through holes 22a, 22b and 22c by anisotropic etching, a V-groove 20c is formed on one side, the optical elements 3, 4, 5 and 2 corresponding to the holes 22a-22c and groove 20c are set through an UV curing adhesive, then each hole forming region is irradiated with UV from the UV-transmissive glass substrate 23 side, the groove forming region is irradiated with UV from above the groove 20c, and consequently the elements 3, 4, 5 and 2 are mounted in a module substrate 24. In this case, the module substrate 24 is irradiated with UV from its front to fix the optical fiber 2 by an UV curing adhesive, and the substrate is irradiated with UV from its rear to fix the elements 3 and 4 and permanent magnet 5 except the optical fiber 2 with the adhesive. Consequently, an optical isolator without need for the axes alignment is easily produced without lowering its extinction ration. |
