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发明名称
摘要
申请公布号	JPH0332529(Y2)	申请公布日期	1991.07.10
申请号	JP19860169699U	申请日期	1986.11.05
申请人		发明人
分类号	C30B11/00;H01L21/208;(IPC1-7):C30B11/00	主分类号	C30B11/00
代理机构		代理人
主权项
地址

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