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发明名称
MASK HOLDER
摘要
申请公布号
JPH03157918(A)
申请公布日期
1991.07.05
申请号
JP19890297867
申请日期
1989.11.16
申请人
MATSUSHITA ELECTRON CORP
发明人
IMORI YAYASU
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
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