VERFAHREN ZUM MESSEN DER GROESSE VON DURCHGANGSBOHRUNGEN

摘要

Measurements of a value of throughgoing openings and workpieces produced during drilling with energy radiation, and particularly laser radiation are performed by producing each opening by several successive energy pulses with focal points offset relative to an axis of the opening, and determining measuring values from a fluid which passes through the throughgoing opening and is supplied to an opening region of the workpiece with a predetermined, constant pressure.