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发明名称
NONCONTACT TYPE SURFACE-SHAPE MEASURING APPARATUS
摘要
申请公布号
JPH03156304(A)
申请公布日期
1991.07.04
申请号
JP19890295950
申请日期
1989.11.14
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
FUJIWARA NORIAKI
分类号
G01B11/24;G01B9/02
主分类号
G01B11/24
代理机构
代理人
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