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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH03155621(A)
申请公布日期
1991.07.03
申请号
JP19890278568
申请日期
1989.10.27
申请人
TOSHIBA CORP
发明人
HAYASAKA NOBUO;OKANO HARUO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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